What is ISO 15632 about?
ISO 15632 defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier, and a signal-processing unit as the essential parts.
ISO 15632 specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyzer (EPMA).
Note 1: ISO 15632 is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization.
Note 2: The procedure used for the actual analysis is outlined and is outside the scope of ISO 15632.
Who is ISO 15632 for?
ISO 15632 on energy-dispersive X-ray spectrometers is applicable to:
- Crystal detector manufacturers
- Electron probe microanalyzers
- Spectrometer manufacturers
Why should you use ISO 15632?
ISO 15632 specifies progress in energy-dispersive X‑ray spectrometry (EDS) by means of improved manufacturing technologies for detector crystals and the application of advanced pulse-processing techniques that have increased the usual performance of spectrometers, at high count rates and at low energies (below 1 keV). EDS is one of the most applied methods used to analyze the chemical composition of solids and thin films.
ISO 15632 was developed in response to a worldwide demand for minimum specifications of an energy-dispersive X‑ray spectrometer.
ISO 15632 permits comparison of the performance of different spectrometer designs based on a uniform specification and helps to find the optimum spectrometer for a particular task.
In addition, ISO 15632 contributes to the equalization of performances in separate test laboratories.
Such laboratories should periodically check the calibration status of their equipment according to a defined procedure. ISO 15632 serves as a guide for similar procedures in all relevant test laboratories.