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Microbeam analysis. Electron backscatter diffraction. Vocabulary

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1 Scope

This document defines terms used for the electron backscatter diffraction (EBSD) technique. This document covers both general and specific concepts classified according to their hierarchy in a systematic order.

This document is applicable to standardization documents relevant to EBSD practices. In addition, some definitions in this document are applicable to transmission Kikuchi diffraction (TKD).